SP Characteristics

• Resistant to high/low
• temperatures
• Low-wear and low-friction under high PV conditions
• Excellent creep resistance
• Electrically insulated with a dielectric strength of 22 KV/mm 
• Plasma and radiation resistance
• Low gas emissions under high vacuum (-10 Torr)
• Excellent machinability

SCP5000 Characteristics

• High Performance Material
• for Handling or Holding Substrate
• Highly “rigid” polyimide structure
• High mechanical strength
• Recommended for use in lift pins and screws
• Good chemical compatibility
• Excellent plasma resistance
• Excellent dimensional stability
• Low water absorption rate
• Low coefficient of thermal expansion
• Good heat resistance
• Good chemical resistance
• Exceptional machinability
• Exceptional purity
• Low emissions